Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

This paper describes a hybrid mass sensing system comprising QCM (quartz crystal microbalance) sensor operating under atmospheric pressure and 3-DOF mode localized coupled resonator in vacuum. Nanoparticles as consecutive perturbations are added onto the QCM, output signals with respect to amount of change then being manipulated generate electrostatic forces. Subsequently, forces act on external stiffness perturbations. The metrics were defined as: resonant frequency shifts, vibration amplitude changes, changes resonance ratio. Measured data was analyzed for these compared. work demonstrated that proposed attained 2.5×10 6 N(m · kg)-1 transduction factor, has potential be employed direct liquid contact biochemical transducer.